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Project 1: Vertical-aligned Graphene Interdigitated for ultra-sensitive NEMS

Vertical oriented graphene (VG) nanosheets have attracted growing interest for a wide range of applications ranging from energy storage, catalysis and field-emission to gas sensing, due to their unique orientation, exposed sharp edges, non stacking morphology and huge surface-to-volume ratio. However, controllable growth of vertical aligned graphene with uniform spacings between the sheet is extremely difficult due to delicate substrate/catalyst preparation, non-uniformity of substrate orientation and the nature of 2D material that inhibit them to freely standing and grow vertically like their allotrope, carbon nanotubes . In normal condition, graphene tends to grow horizontally attached to its catalyst.

Here we propose a novel method in enhancing vertically-aligned grown graphene directly from substrates. The substrate`s orientation, grating structured of catalyst, and application of electric and external magnetic field to the substrate are expected to guide the initial nucleation of carbon atoms to grow as vertical graphene. These vertically aligned graphene will be directly grown on interdigitated electrodes structure to utilize its high surface-to volume ratio to fabricate graphene-based NEMS supercapacitor. The mechanical and piezoelectric behavior of vertical graphene will be evaluated to study its suitability as ultra-high sensitivity NEMS pressure sensors. Finally, the as-grown graphene will be integrated in cavities of photonic crystal for application in NEMS biomolecule sensors.


Prof. Dato’ Dr. Burhanuddin Yeop Majlis
Institute of Microengineering and Nanoelectronics (IMEN)
Universiti Kebangsaan Malaysia
43600 UKM Bangi, Selangor


  • To design and fabricate high capacitance supercapacitor based on vertical-aligned graphene on interdigital electrode structures by direct growth method.
  • To fabricate high sensitivity pressure sensor for bio-medical applications using MEMS and NEMS process techniques
  • To develop High-Quality factor Graphene Based 1D and 2D PhC Cavities for Pathogen detection

 Expected Outcome

  • Growing technique of vertically aligned graphene and its nano device fabrication for application in Nano electromechanical systems and devices
  • Super capacitor, pressure sensor and pathogen detector prototypes


Dr Mohd Ambri Mohamed  
 Dr Ahmad Rifqi Md Zain  
 Assoc Prof Dr Badariah Bais  
Assoc Prof Dr Azrul Azlan Hamzah   
 Assoc prof Dr Jumril Yunas
 Assoc Prof Dr Dee Chang Fu
  Dr Rhonira Latif



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